【用於表面微观形貌检测的扫瞄探针显微理论与技术的研究】曹伟.pdf

【用於表面微观形貌检测的扫瞄探针显微理论与技术的研究】曹伟.pdf

DissertationSubmitted toHuazhongUniversity of Science and Technology for the Degree of Doctor of Philosophy in Engineering Research onScanningProbeMicroscopy andIts ApplicationtoNanotopographyMeasurement Ph.D.Candidate:Cao Wei Supervisor:Prof.ShiHanmin Prof.YangShuzi Ass.Supervisor:Prof.ABSTRACT In this thesis,the Scanning Probe Microscopy and its application to the surface nanotopography measurement are systermatically studied.All of thebasic theoretical and technologicalissues related to SPM are discussed,during the design and the develop mentofalong-rangeScanningTunnelingMicrosc英文缩写说明 SPMScanningProbeMicroscope(y),扫描探针显微镜(技术)。是所有基于近场探 测显微镜的总称,包括STM、AFM、SNOM、FFM等等。其核心是利用高精 度扫描加具有纳米级(或原子级)针尖的探针,根据针尖与试件表面的某 种局域参量之间的相互作用,在近场对试件表面进行实空间(realspace)STMScanningTunnelingMicroscope,扫描隧道显微镜。利用具有纳米级圆弧半 径的导体探针针尖与导体表面之间在近场(小于试件表面费来能级上的 电子波长)产生的隧道电流,来作为测量或控制参量。具有原子级分辨率。