【超精表面微观形貌扫瞄隧道显微检测技术及装置的研究】李尚平.pdf
ADissertationSubmittedtoHuazhong UniversityofScienceandTechnologyfortheDegree ofDoctorofPhilosophyinEngineering ResearchonScanningTunnelingMicroscopy and theInstrumentUsed forUltraprecision SurfaceMeasuring Ph.D.Candidate:Li Shangping Supervisor Prof.Chen Riyao Prof.Shi Hanmin Ass.
分析了探针不同装夹位置对纵向测量精度的影响,研制了一种探针中间装夹式 快换夹头.采用所研制的STM检测了高定向石墨原子排列图像及精密光栅,证明其具 有原子级和nm级的分辨率。采用逐级定位放大扫描等技术检测了典型的超精 表面纳诺形貌。通过对金刚石镜面车削试件、粗糙度标准研磨样块、单颗粒磨削 试件及光盘等扫描检测发现了一些重要的nm级的微观特征及微观机理。
nique is presented.In thisway therougher microtopography can be measured satisfacto rily.Furthermore,theverticalsensitivityandlateralresolutionoftheSTMaredefined separately.Itisfoundtobesatisfiedthatthesensitivity,lateralresolutionandscanning rangeallcanbeadjustedcontinuouslyintheresearchedrange.