【曲面表面形貌检测理论与方法的研究】蒋向前.pdf
Adissertationsubmittedto HuazhongUniversityofScienceandTechnology fortheDegreeofDoctorofPhilosophyinEngineering TheoryandMethodfor Measurement of Curved Surface Topography Ph.D Candidate:JIANG Xiangqian Major:Mechanical Engineering Research Field:Measurement Technology andScientificInstruments Su
精度测试结果,该系统的垂直测量范围6mm,垂直分辨率1nm,动态比率6 000000/1示值误差土2 ,示值变动性<1 ,示值稳定性优于0。该 定,论述该系统的一篇论文获1994年湖北省自然科学优秀论文一等奖。该 系统参加了1995年3月在北京举行的中国仪器仪表博览会的展出。
Theresearchresults concerning the sensor and its signalprocessing have beenreportedtoahigherbodyforanationalinventionpatentofChina(Applica- tionNo)Themathematicalmodelswith thebestfitting,orderjudginganddigitalfil- polynomialandtheleastsquarehighordercurvedsurfacesareadoptedasthebest fi