【相移干涉技术在表面粗糙度非接触测量中的理论和应用研究】刘冲.pdf
Mechanical Engineering MeasurementTechnology andScientificInstruments Dissertation Submitted to HuazhongUniversityofScienceandTechnology for theDegreeofDoctorinEngineering Theory andApplication of PhaseShiftInterferometryinNon-contact MeasurementofSurfaceRoughness:LIU Chong Prof.
ABSTRACT Opticalinterferometryhasbeenwidelyappliedinnon-contactmeasurementof surfaceroughness,butthemeasuredsurfaceprofilecannotbeobtainedbytraditional way,andmeasuringrelativeerrorisunnegligible.Inthisdissertation,anewmethod withphaseshiftinterferometry,cxternalsynchrocontrolandsaw-toothwavephase m
3干涉条纹传播速度 3光积分探测器上光强的变化 3相位调制函数 3锯齿波相位调制相位测量算法 3多次积分相位求解算法 3四次积分算法 3本章小结 相位调制器及其定标研究 4相位调制方法的选择 4相位调制器 4调制器材料选择 4调制器结构 4调制器特性分析 4相位调制电压驱动器 4电压驱动方案电压驱动器 4性能特性 4定标实验研究 4静态特性实验 4.