【高精密表面粗糙度非接触测量理论与方法研究】陈涛.pdf

【高精密表面粗糙度非接触测量理论与方法研究】陈涛.pdf

MechanicalEngineering July,1993 ChenTao Prof.Li Zhu A DissertationSubmitted toHuazhongUniversityof Science and Technology for theDegree of Doctor of Engineering Non-contactMeasurement TheoryandMethod Researches on Roughness ofHigh Precision Surface Huazhong University ofScience and Technology Ph.D.ABSTRACT Non-contact measurementused for highprecision surface roughness is the require-ment ofdevelopment ofmodern science and technology.In this dissertation,various non-contact measurement methods are overall discussed,especially the theory,method,characteristic and suitability ofthe opticaltecS2精密定位系统的研究 表面粗糙度非接触测量微机辅助多参数测控系统 Ⅱ 3平行双光束补偿式光学系统设计 3光学测头中各部分的作用及要求 3光学测头元件的参数设计 3光学测头的性能分析及噪声抑制技术 3光斑尺寸的理论分析 3光斑尺寸与横向分辨率的关系 3光学测头的误差及其补偿原理 第四章 4调焦光学系统的方法研究 4几种调焦方法比较 4.