【真空电弧沉积薄膜的基础理论及实验研究】王浩.pdf
andZouJiyan THEORETICALANDEXPERIMENTALRESEARCH ONVACUUMARCDEPOSITION by WangHao Supervised byProfessorsLinJinming,ChengLichun Adissertation SubmittedtothefacultyoftheGraduateSchoolof HuazhongUniversityofScienceand Technology inPartialFulfillmentof theRequirements fortheDegreeofDoctorofPhilosophy inE
ABSTRACT?Thisdissertationisdevotedtothetheoreticalandexperimentalstudiesonvacu Thefirstpartconcentrateson thetheoreticalanalysison thebasicphenomenain the process ofvacuumarcdeposition.Inchaptertwo,some physicalprocessare analyscd.
第四章真空电弧沉积薄膜阴极过程数学模型的研究 第五章真空电弧沉积薄膜实验装置 5电弧离子源的设计 5总体结构设计 5主电源及自动触发装置的设计 5偏压电源及加热电源的设计 5电气控制系统的设计 第六章电弧阴极现象的高速摄影研究 6阴极斑点高速摄影观测结果及分析 6.