【非晶硅的准分子激光晶化及其分子动力学模拟】戴永兵.pdf
Professor:Xu Zhongyang EXCIMERLASERCRYSTALLIZATIONOF AMORPHOUSSILICONANDITSMOLECULAR DYNAMICSSIMULATION by Dai Yongbing SupervisedbyProfessor:LiXingjiao ADissertation SubmittedtotheDegreeEvaluationCommittee ofHuazhongUniversity ofScience andTechnology fortheDegreeofDoctorofPhilosophyin Microelectron
华中理工大学博士学位论文 Abstract Excimerlasercrystallizationofamorphoussilicon(a-Si)filmsisthemostpromising wayforachievingsuperior-qualitypolycrystallinesilicon(p-Si)films.Theresearch on theelectricalandstructuralpropertiesoftheexcimerlasercrystallizedsiliconfilmsand thetransientmeltingandrecrystallizationbeh
(1-12)(1-2)(2-9)(9-10)(10-11)(11-12)(13-30)(13-13)(1-15)(15-21)(21-29)(29-30)(31-44)(31-31)(31-33)(34-35)(36-38)(38-44)(44-44)(45-56)(45-45)(45-46)(47-51)(52-56)(56-56)(57-85) 华中理工大学博士学位论文 目录 IV 1分子动力学模拟方法及其在半导体材料研究中的应用.