[锆钛酸铅铁电薄膜的制备及红外探测应用研究]陈实

【锆钛酸铅铁电薄膜的制备及红外探测应用研究】陈实.pdfStudy of thePreparation and InfraredDetecting Application of Lead ZirconateTitanate Ferroelectric Thin Film by Chen Shi Supervised byProfessorLiu Meidong A Dissertation Submitted to theDegree Evaluation Committee of Huazhong ofPhilosophyinMicroelectronicsandSolidStateElectronics June,2001 Department华中科技大学博士学位论文 行了深入研究,分析了四甲基氢氧化铵水溶液(TMAH)浓度和温度变化对硅单 晶各向异性腐蚀的腐蚀速率和腐蚀效果的影响,成功地制备出能够显著减小铁电 薄膜热释电红外探测器灵敏元热传导和热容量的硅牺牲层.在理论和实验研究的基础上,研制出达到国内先进水平、具有良好红外探测 性能的PZT铁电薄膜热释电单元红外探测器,并在国内首次制备出PZT铁电薄 膜热释电8元、9元和10元线列红外探测器,为非制冷热释电红外探测器阵列 与热成像器件的研制打下了一定的基础。华中科技大学博士学位论文 reaction have alsobeen studied in details based onFourier transform infrared(FTIR) andHandCnuclear magneticresonance(NMR)analysis.The analyticalresults show thattherearesome additional advantages,such as the simple chemicalreactions for sol-gel processing,high stability for multi-comp
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