【表面形貌复合评定理论与方法的研究】卢圣凤.pdf
ADissertationSubmittedto AcademicEvaluationCommitteeof HuazhongUniversityofScienceandTechnology for theDegreeof Doctor ofPhilosophyinEngineering Theory and Methodfor CompositeCharacterization ofEngineeringSurfaces Ph.D Candidate:LU Shengfeng Subject:Mechanical Manufacturing and Automation Supervis
华中科技大学博士学位论文 Abstract Characterizationandmeasurementofsurfacemicro-topographyiscriticaltothe development of surface science,material science,biological science andmicroelectronics.Onthebasisofafullreviewofthestateoftheartonsurfacecharacterizationand measurement,this dissertationreports theauthorsr
华中科技大学博士学位论文 5 表面多重分形转折尺度研究5本章小结第六章表面复合评定分析系统6 系统工作原理6 系统硬件设计6 系统软件设计6 本章小结第七章表面测量复合传感器设计7 表面形貌测量原理7 接触测量方法和非接触测量方法比较7 表面复合传感原理7 复合传感器标定及测量实验系统7 本章小结第八章总结与展望8全文总结8.