[微结构的静电力显微测量与力学特性测试技术的研究]王志勇

【微结构的静电力显微测量与力学特性测试技术的研究】王志勇.pdfADissertationSubmittedinPartialFulfillmentoftheRequirements fortheDegreeof Doctor of PhilosophyinEngineering ResearchonElectrostaticForceMicroscopyandMechanics TestingofMicrostructures Candidate:WangZhiyong Major:MechanicalManufacturingandAutomation Supervisor:Prof.ZhangHonghai Prof.华中科技大学博士学位论文 合金薄膜、脆性聚酰亚胺薄膜等微小样品在不同加载速率、不同温度循环条件下,进 行了拉伸、端变、疲劳测试。华中科技大学博士学位论文 structureddecoupling 6-axismicro-force sensor is fabricated because themicro-force shouldbecontrolledandmeasuredduring themechanicalmeasurementofaMEMS specimen.Itisalsousedin the automaticspecimenalignmentmonitoring as the force feedback.
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